Niobium Sputtering Target

Company: 
Baoji Towin Rare Metals Co., Ltd
 
Material: Nb1, Nb2
Specification:

Specification: Customized as per request

Impurities:

Metallic impurities, ppm max by weight

Element Cu Ti Mn Hf Fe Al Mo Cr Si Ta Ni W Zr
Content 10 5 5 20 20 5 10 5 30 200 5 15 50

Non-Metallic impurities, ppm max by weight

Element N O C H
Content 50 100 50 10

Grain Size : 40-80μm,(customized by customers’ requirements)Other grain size available upon request

Recrystallization: 95%min

Flatness ≤0.2mm

Surface Roughness<1.6μm

Standard: ASTM B393
Surface Treatment: Surface Roughness<1.6μm
Applications: Film coating in semiconductor and optics
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